We performed the tapping test around IFI area and IMC area.
As you can see in klog24187 and klog24214, the shape and characteristics is different.
When we tapped the IMC chamber, wider peak like klog24214 detected.
And when we tapped the IFI chamber, several narrow peaks appeared like klog24187.
We performed the swept-sine shaker injection on the copper flange of the IFI chamber, between 50-500 Hz.
Frequency conversion (such as sideband) except for the harmonics was not observed.
around 8.2 minute
