I checked DC responses from each actuator to each sensor. The coefficients of H2 and H3 in IM should be larger than H1. Please compare with PRM and PR3.
BF damper (LVDT)
| [um/count] | |
| V1 | 0.0033 |
| V2 | 0.0026 |
| V3 | 0.0023 |
| H1 | 0.029 |
| H2 | 0.032 |
| H3 | 0.030 |
IM (OSEM)
| [um/count] | |
| V1 | 0.008 |
| V2 | 0.009 |
| V3 | 0.009 |
| H1 | 0.017 |
| H2 | 0.014 |
| H3 | 0.017 |