I checked DC responses from each actuator to each sensor. There was a large difference between H2 and H3 in IM. It may be due to the difference in the DC position of OSEM (68um and 232um).
BF damper (LVDT)
| [um/count] | |
| V1 | 0.0023 |
| V2 | 0.0026 |
| V3 | 0.0023 |
| H1 | 0.033 |
| H2 | 0.028 |
| H3 | 0.026 |
IM (OSEM)
| [um/count] | |
| V1 | -0.009 |
| V2 | -0.013 |
| V3 | -0.010 |
| H1 | -0.013 |
| H2 | -0.035 |
| H3 | -0.020 |