I checked DC responses from each actuator to each sensor. There was a large difference between H2 and H3 in IM. It may be due to the difference in the DC position of OSEM (68um and 232um).
BF damper (LVDT)
[um/count] | |
V1 | 0.0023 |
V2 | 0.0026 |
V3 | 0.0023 |
H1 | 0.033 |
H2 | 0.028 |
H3 | 0.026 |
IM (OSEM)
[um/count] | |
V1 | -0.009 |
V2 | -0.013 |
V3 | -0.010 |
H1 | -0.013 |
H2 | -0.035 |
H3 | -0.020 |