Routine check for DGS maintenance day (Feb. 4)

Stepper motor
 [Check contents]
  Check if the power supply can be controlled by BIO.
  Check if the script can be started.
  Check that the limit switch installed is green.
 [Check result]
  No problem (BS was in use, so it was not used this time)

Release Sensor
 [Checked]
 Confirmed that the Release Sensor is 0. 1: Seated
 [Check result]
 ETMX, ETMY, ITMX, ITMY : No problem

Picomotor
 [Checked]
  Ping Test is performed.
 [Check result]
  Known only

 NG: 
  MCI,STM1,
  AS_WFS,POP_POM,POS_POM,REFL_WFS,POM1
  MCF(MCO,MCI)
  　=> Confirmation only, no recovery work was done.

 OK:
  ETMX,ETMY,ITMX,ITMY
  BS(IM,BF),SRM(IM,BF),SR2(IM,BF,STM),SR3(IM,BF)
  PRM(IM,BF),PR2(IM,BF),PR3(IM,BF)
  MCE,IMMT1,IMMT2,OMMT1,OMMT2,OSTM

  PCAL(EX1,EX2,EY1,EY2):Not confirmed because it is ON only when used.

Temperature Control
 [Checked]
 Check if the temperature acquisition is working properly.

 [Check result]
  No problem

Precision air Processer
 [Checked]
 Is the temperature acquisition function working properly?

 [Check result]
  No problem