Routine check for DGS maintenance day (Oct. 29)

Stepper motor
 [Checked]
  Check if the power supply can be controlled by BIO.
  Check if the script can be started.
  Confirmed that the limit switch installed is in Green.
 [Check result]
  No problem

Release Sensor
 [Checked]
 Confirmed that the Release Sensor is 0. 1: Seated
 [Check result]
 ETMY, ITMX, ITMY : No problem
 ETMX_F1_1 : abnormal, no other problems (known)

Picomotor
 [Checked]
  PingTest is performed.
 [Result]
 NG:
  No problem

  MCI,STM1,IMMT1,IMMT2: NG
  AS_WFS,POP_POM,POS_POM,REFL_WFS,POM1: NG
  　=> Confirmation only, no recovery work done.

 OK:
  ETMX,ETMY,ITMX,ITMY
  BS(IM,BF),SRM(IM,BF),SR2(IM,BF,STM),SR3(IM,BF)
  PRM(IM,BF),PR2(IM,BF),PR3(IM,BF)
  MCF(MCO,MCI),MCE
  OMMT1,OMMT2,OSTM

  PCAL(EX1,EX2,EY1,EY2):Not confirmed because it is ON only when used.

Temperature Control
 [Checked]
 Check if the temperature acquisition is working properly.

 [Check result]
  No problem