I performed a health check of the suspension.

• The health check scripts for the IP and BF GAS did not work.
• The IM H1, H2, H3, L, T, and Y TFs had a gain lower than the references. The H1/2/3 OSEM positions are out of linear range.
• The F0 and F1 GAS TFs were very different from the references when the BF GAS was around the setpoints in the READY state (Plot 20, 21). The BF GAS behavior was like rubbing. When the BF GAS was about +1500 (um) far from the setpoint with the FR (Plot 22), the rubbing was settled. Then the F0 and F1 GAS TFs were still different in the READY mode. The F0 and F1 GAS TFs were recovered when the GASs were controlled in DC (ALIGN -> FLOAT); the BF GAS was at the setpoint (Plot 23, 24). The point is not the keyston position but the FR position.