Routine check on DGS maintenance day (4/1)

Stepper motor
 [Check details]
  Check if power supply can be controlled by BIO
  Confirmation that script can be started
  Check that the limit switches installed are green.
 [Result]
  No problem
  
Release Sensor
 [Contents to be checked].
 Confirm Release Sensor is 0, 1: Seated
 [Confirmation Result]
 ETMX, ETMY, ITMX, ITMY : No problem

Picomotor
 [Confirmation details]
  Perform PingTest
 [Result]
  Known only

 NG: 
  MCI,STM1,
  AS_WFS,POP_POM,POS_POM,,OM1
  MCF(MCO,MCI)
  　=> Confirmation only, no recovery work was performed.

 OK:
  ETMX,ETMY,ITMX,ITMY
  BS(IM,BF),SRM(IM,BF),SR2(IM,BF,STM),SR3(IM,BF)
  PRM(IM,BF),PR2(IM,BF),PR3(IM,BF)
  MCE,IMMT1,IMMT2,OMMT1,OMMT2,OSTM
  REFL_WFS
  PCAL(EX1,EX2,EY1,EY2):Not checked because it is ON only when used

Temperature Controller
 [Check details]
 Is the temperature acquisition working properly?

 [Result]
  No problem

Precision Air Processer
 [Check details]
 Is the temperature acquisition working properly?

 [Result]
  No problem