Routine check on DGS maintenance day (3/18)
Stepper motor
[Check details]
Check if power supply can be controlled by BIO
Confirmation that the script can be started
Check that the limit switches installed are green.
[Result]
No problem
Release Sensor
[Contents to be checked].
Confirm Release Sensor is 0, 1: Seated
[Confirmation Result]
ETMX, ETMY, ITMX, ITMY : No problem
Picomotor
[Confirmation details]
Perform PingTest
[Result]
Known only
NG:
MCI,STM1,
AS_WFS,POP_POM,POS_POM,REFL_WFS,POM1
MCF(MCO,MCI)
=> Confirmation only, no recovery work was performed.
OK:
ETMX,ETMY,ITMX,ITMY
BS(IM,BF),SRM(IM,BF),SR2(IM,BF,STM),SR3(IM,BF)
PRM(IM,BF),PR2(IM,BF),PR3(IM,BF)
MCE,IMMT1,IMMT2,OMMT1,OMMT2,OSTM
PCAL(EX1,EX2,EY1,EY2):Not checked because it is ON only when used
Temperature Controller
[Check details]
Is the temperature acquisition working properly?
[Result]
No problem
Precision Air Processer
[Check details]
Is the temperature acquisition working properly?
[Result]
No problem