VAC (EX)nobuhiro.kimura - 14:55 Saturday 22 January 2022 (19536)
Print this reportComment to Result of the vacuum leak test for EXC area between X-arm gate valve and BRT gate valve (Continued) (19491)When: 21/Jan./2022 Who:Kimura, Tomaru, Yasui and Yano Task: We fixed very large vacuum leak place at the EXV chamber. The place was on D-sub type hermetic sealed connector . Pleas see attached photos. The leak level was 3.0 x 10^-7 Pam^3/s.
We are assuming the reason of leak was crack in the ceramic or pin hole of sealing between pin and the ceramic. We will discuss how to repair it.