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VAC (EX)
nobuhiro.kimura - 14:55 Saturday 22 January 2022 (19536) Print this report
Comment to Result of the vacuum leak test for EXC area between X-arm gate valve and BRT gate valve (Continued) (19491)
When: 21/Jan./2022
Who:Kimura, Tomaru, Yasui and Yano
Task:
We fixed very large vacuum leak place at the EXV chamber.
The place was on D-sub type hermetic sealed connector .
Pleas see attached photos.
The leak level was 3.0 x 10^-7 Pam^3/s.

We are assuming the reason of leak was crack in the ceramic or pin hole of sealing between pin and the ceramic.
We will discuss how to repair it.
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