Routine check for DGS maintenance day (1/21)

Stepper motor
 [Checked]
  Check if the power supply can be controlled by BIO.
  Check if the script can be started.
  Confirmed that the limit switch installed is in Green.
 [Check result]
  No problem.

 The following settings were made.
  Change the value of software limit of ETMX and ITMX GAS (E2213706-v3)

 The HW limit switches on the ETMX IP were all red because the cable had been unplugged during the leak test, but later checks showed that they were all green, so no problem.
  

Release Sensor
 [Checked]
 Confirmed that the Release Sensor is 0. 1: Seated
 [Check result]
 ETMX, ETMY, ITMX, ITMY : No problem

Picomotor
 [Checked]
  Ping Test is performed.
 [Check result]
  Known only

 NG: 
  MCI,STM1,IMMT2
  AS_WFS,POP_POM,POS_POM,REFL_WFS,POM1
  MCF(MCO,MCI)
  　=> Confirmation only, no recovery work was done.

 OK:
  ETMX,ETMY,ITMX,ITMY
  BS(IM,BF),SRM(IM,BF),SR2(IM,BF,STM),SR3(IM,BF)
  PRM(IM,BF),PR2(IM,BF),PR3(IM,BF)
  MCE,IMMT1,OMMT1,OMMT2,OSTM

  PCAL(EX1,EX2,EY1,EY2):Not confirmed because it is ON only when used.

Temperature controller
 [Checked]
 Check if the temperature acquisition is working properly.

 [Check result]
  No problem

Precision air processer
 [Checked]
 Is the temperature acquisition function working properly?

 [Check result]
  No problem