The summary of the LVDT coefficients was revised. The coefficients for F0 and IP in IY were changed due to the replacement of the LVDT driver. The unit is [um/count].
[GAS filter]
| IX | EX | IY | EY | |
| F0 | 0.497 | -0.394 | -0.522 | 0.196 |
| F1 | -0.182 | -0.223 | -0.342 | -0.447 |
| F2 | -0.215 | -0.244 | 0.475 | 0.189 |
| F3 | 0.194 | -0.225 | 0.109 | -0.304 |
| BF | -0.296 | 0.204 | 0.226 | -0.848 |
[IP]
| IX | EX | IY | EY | |
| H1 | 0.211 | 0.260 | -0.191 | -0.166 |
| H2 | -0.154 | 0.245 | 0.236 | 0.145 |
| H3 | 0.234 | 0.259 | 0.257 | -0.162 |
[BF damper]
| IX | EX | IY | EY | |
| V1 | -0.548 | -0.697 | 0.485 | 1.017 |
| V2 | -0.538 | 0.576 | 0.546 | 0.688 |
| V3 | -0.612 | 0.622 | -0.551 | 0.688 |
| H1 | 0.533 | 0.584 | -0.595 | 0.855 |
| H2 | -0.506 | -0.692 | 0.506 | 0.711 |
| H3 | 0.503 | -0.573 | -0.544 | -0.760 |