This is the summary of the LVDT coefficients. The coefficients for F0 and IP in IY will be changed due to the replacement of the LVDT driver. The unit is [um/count].
[GAS filter]
IX | EX | IY | EY | |
F0 | 0.497 | -0.394 | (-0.403) | 0.196 |
F1 | -0.182 | -0.223 | -0.342 | -0.447 |
F2 | -0.215 | -0.244 | 0.475 | 0.189 |
F3 | 0.194 | -0.225 | 0.109 | -0.304 |
BF | -0.296 | 0.204 | 0.226 | -0.848 |
[IP]
IX | EX | IY | EY | |
H1 | 0.211 | 0.260 | (-0.268) | -0.166 |
H2 | -0.154 | 0.245 | (-0.208) | 0.145 |
H3 | 0.234 | 0.259 | (-0.237) | -0.162 |
[BF damper]
IX | EX | IY | EY | |
V1 | -0.548 | -0.697 | 0.485 | 1.017 |
V2 | -0.538 | 0.576 | 0.546 | 0.688 |
V3 | -0.612 | 0.622 | -0.551 | 0.688 |
H1 | 0.533 | 0.584 | -0.595 | 0.855 |
H2 | -0.506 | -0.692 | 0.506 | 0.711 |
H3 | 0.503 | -0.573 | -0.544 | -0.760 |