[Miyoki, Ushiba, Takahashi]

We found the IP was oscillating around 1Hz as well as the TM. We tried to change the setpoint of F3 from 560 to 570. The oscillation of TM/IP at 1Hz and  the oscillation of F3 at 0.04Hz became small. Just in case, we changed the setpoint more to 654; in total +100 from Nov. 11. The setpoint of F1 was also corrected from -1533 to -1633. We understood the F3 keystone was possibly rubbing at the lower position.

The F1, F2, and F3 GAS filters were offloaded with the FRs.