I checked the reason why ETMX was oscillated.
Figure 1 and 2 show the signals of NB filters and MN DAMP filters, respectively.
DOF5 and MN_DAMP_L was oscillated at 5.1 Hz, which should be damped by DOF5.
So, it is very likely that the reason of the oscillation is DOF5 NB filter.
This filter was optimized when ETMX is at 90 K, so it is neccesary to optimize it again at the current temperature.