VAC (IFI)takashi.uchiyama - 12:20 Thursday 29 September 2022 (22241)
Print this reportConversion flange (IS0K400->ICF152) has been set to -Y side of the IFI chamber. 2022/09/29
Mirapro, Kimura, Akutsu, Uchiyama
We set a conversion flange (ISOK400->ICF152) to the -Yside of the IFI chamber.
Since we found a scratch in the groove of the flange we used in O3GK, we used a different conversion flange.
Vertical lines (Kegaki-sen) on the flange surface were aligned in the vertical direction and it was checked by a laser leveler.