Summary of monitoring IP of ITMY during pumping down.
Followings are the necessary steps for centering IP position.
IPL: -24800 steps
IPT: -22400 steps
IPY: +6400 steps
Note:
Figure 1 shows the trend of GAS position and BFV during pumping down.
According to the trend of BFV, total amount of height change is about 0.65 mm.