with Hirata-san, Yano-san, and Miyoki-san
At first, we cleaned outside and inside the chamber.
And then we peeled off both sides of the FC using a Top gun.
The center area seems clean mostly but there were still some dirt and dust that is on the out-of-jig range.
Unfortunately, FC residue remains on the HR right side, which we pulled the peeling tab(fig.1).
On the other hand, we successfully peeled off AR FC, but tragically I touched the surface of the AR mirror when we inspected it after peeling and made a new stain on its upper left(fig.2).
Both of them may affect the beam, we decided to try to remove them.
At first, we applied the FC on a partial area of the AR side(fig.3).
We'll remove this additional FC and inspect it again tomorrow morning.
Next, we pushed away the HR FC residue by using swab stick and Vectra alpha(fig.4).
This stain were divided and pushed to its edge direction but slightly spreded(fig.5).
NOTE;
1. DO NOT pointâ at remaining dirt after cleaning.
2. Before applying, check the beam path and put a peeling tab on the least affected area.