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VIS (BS)
hiromi.yasui - 17:32 Thursday 21 October 2021 (18655) Print this report
Target Sticker pasting

Tomaru-san, Yasui

We rechecked the height difference between the BS and SR3/SRM/PR2.

And we pasted target stickers, showing the design height of these chambers.

We also made the copy target sticker of BS center average position in PR3 clean room.

Comments to this report:
hiromi.yasui - 17:27 Tuesday 26 October 2021 (18692) Print this report

Tomaru-san, Yasui

We pasted the Design Height Stickers of PR3, PRM, and IMM.

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