Tomaru-san, Yasui
We rechecked the height difference between the BS and SR3/SRM/PR2.
And we pasted target stickers, showing the design height of these chambers.
We also made the copy target sticker of BS center average position in PR3 clean room.
Tomaru-san, Yasui
We rechecked the height difference between the BS and SR3/SRM/PR2.
And we pasted target stickers, showing the design height of these chambers.
We also made the copy target sticker of BS center average position in PR3 clean room.
Tomaru-san, Yasui
We pasted the Design Height Stickers of PR3, PRM, and IMM.