Mirapro, Edwards All the ion pumps in the Y-arm are operating from 2019/12/25. Vacuum pressures [Pa] in the Y-arm are followings, Y-2; 2.0E-6 Y-10; 1.1E-6 Y-15; 6.9E-7 Y-21; 1.0E-6 Y-27; 2.5E-6