Mirapro, Edwards All the ion pumps in the X-arm are operating from 2019/12/25. Vacuum pressures [Pa] in the X-arm are followings, X-2; 1.2E-5 X-10; 2.0E-5 X-15; 2.8E-6 X-21; 1.8E-6 X-27; 9.0E-6