I tried to make larger gap between one of the primary and secondary coil of the BF-LVDTs, by using the stepping motor at IP stage, but the stuation were not much improved. Now the coils are not touching if we do not excite large motion. This will be adjusted somehow.
Just for my note, the following is the status in um:
IP-L | IP-T | IP-Y | BF-L | BF-T | BF-V | BF-P | BF-R | BF-Y | |
just before pumping | 750 | -750 | -50 | -1250 | 200 | -4400 | 6200 | 2200 | 16000 |
18h27m 30th | 720 | -71 | 106 | -2715 | -171 | -4720 | 6426 | 2130 | 20889 |
PosA/B/C => 13315/130698/-76268 steps