According to this result and optical layout measurement reesults in klog17461, new calibration factor is 439.5 um/cnt.
This value is 1-2% larger than before but not so drastic change.
According to this result and optical layout measurement reesults in klog17461, new calibration factor is 439.5 um/cnt.
This value is 1-2% larger than before but not so drastic change.