[Tomaru, Nishimoto, mTakahashi, Ushiba]
We continued the upgrade work.
Actuators and sensors on MN stage were installed.
Remaining thing is installation of actuators on IM stage and cabling.
[Tomaru, Nishimoto, mTakahashi, Ushiba]
We continued the upgrade work.
Actuators and sensors on MN stage were installed.
Remaining thing is installation of actuators on IM stage and cabling.