DGSメンテナンスデー(8/4)の定期確認

Stepperモーター
 [確認結果]
  問題なし
   SRM,PRMはスキップ

Release Sensor
 [確認結果]
 ETMX, ETMY, ITMX, ITMY : 問題なし

Picomotor
 [確認結果]
  既知のみ

 NG:
  MCI,STM1,
  POS_POM,POM1
   => 確認のみ、復旧作業はしませんでした。

 OK:
  ETMX,ETMY,ITMX,ITMY
  BS(IM,BF),SRM(IM,BF),SR2(IM,BF),SR3(IM,BF,STM)
  PRM(IM,BF),PR2(IM,BF),PR3(IM,BF)
  MCE,IMMT1,IMMT2,OMMT1,OMMT2,OSTM
  REFL_WFS,POP,POP2,POS,POS2,POP_WFS,AS_WFS
  POP_POM、MCF(MCO,MCI)
  PCAL(EX1,EX2,EY1,EY2):使用時のみONなので未確認

温度調整機
 [確認結果]
  問題無し

精密空調
 [確認結果]
  問題無し

FunctionGenerator
 [確認結果]
 ・X,YのPLLは正常に動作している。

HWP control PC
 (確認結果)
 ・k1hwp0,1,2,3,4:OK

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DGS Regular maintenance day(8/4)

Stepper motor
 [Check result]
  No problem
   Skip SRM, PRM

Release Sensor
 [Check result]
 ETMX, ETMY, ITMX, ITMY : No problem

Picomotor
 [Result]
  Only known

 NG:
  MCI,STM1,
  POS_POM,POM1
   => Confirmation only, no recovery operation was performed.

 OK:
  ETMX,ETMY,ITMX,ITMY
  BS(IM,BF),SRM(IM,BF),SR2(IM,BF),SR3(IM,BF,STM)
  PRM(IM,BF),PR2(IM,BF),PR3(IM,BF)
  MCE,IMMT1,IMMT2,OMMT1,OMMT2,OSTM
  REFL_WFS,POP,POP2,POS,POS2,POP_WFS,AS_WFS
  POP_POM, MCF(MCO,MCI)
  PCAL(EX1,EX2,EY1,EY2):Not checked because it is ON only when used

Temperature controller
 [Check result] 
  Is the temperature acquisition working properly?
  => No problem

Precision air Processer
 [Result]
  No problem

FunctionGenerator
 [Check result]
 X and Y PLLs are working properly.

HWP control PC
 (Result) 
 Both k1hwp0, 1 , 2, 3 and 4 are OK.