PR3_BF_T(Motor2)のPicomotorがスタック

PR3_BF_T(Motor2)のPicomotorがスタックしてしまいました。

0から360000まで10000刻みで測定しましましたが、残念ながらスタックが解除できなくなりました。
マイナス方向へ何度も駆動させてみましたが現状解除でき無い状態です。

開始前[count]、開始後[count]
 K1:VIS-PR3_IM_OSEMINF_V1_INMON 1070 1586
 K1:VIS-PR3_IM_OSEMINF_V2_INMON 4980 1970
 K1:VIS-PR3_IM_OSEMINF_V3_INMON 4490 6400
 K1:VIS-PR3_IM_OSEMINF_H1_INMON 6200 8160
 K1:VIS-PR3_IM_OSEMINF_H2_INMON 8620 430
 K1:VIS-PR3_IM_OSEMINF_H3_INMON 6980 11000

開始前[um,urad]、開始後[um, urad]
 K1:VIS-PR3_IM_DAMP_L_INMON 135 -6
 K1:VIS-PR3_IM_DAMP_T_INMON -70 400
 K1:VIS-PR3_IM_DAMP_V_INMON 188 198
 K1:VIS-PR3_IM_DAMP_R_INMON -30 2100
 K1:VIS-PR3_IM_DAMP_P_INMON -1760 -1512
 K1:VIS-PR3_IM_DAMP_Y_INMON 180 2622

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Picomotor of PR3_BF_T(Motor2) got stuck

The Picomotor of PR3_BF_T(Motor2) got stuck.

I measured from 0 to 360000 in increments of 10000, but unfortunately the stack could not be released.
I've tried driving it in the negative direction several times, but I can't release it now.

Before start [count], After start [count]
 K1:VIS-PR3_IM_OSEMINF_V1_INMON 1070 1586
 K1:VIS-PR3_IM_OSEMINF_V2_INMON 4980 1970
 K1:VIS-PR3_IM_OSEMINF_V3_INMON 4490 6400
 K1: VIS-PR3_IM_OSEMINF_H1_INMON 6200 8160
 K1: VIS-PR3_IM_OSEMINF_H2_INMON 8620 430
 K1:VIS-PR3_IM_OSEMINF_H3_INMON 6980 11000

Before start [um,urad], After start [um, urad].
 K1:VIS-PR3_IM_DAMP_L_INMON 135 -6
 K1:VIS-PR3_IM_DAMP_T_INMON -70 400
 K1:VIS-PR3_IM_DAMP_V_INMON 188 198
 K1: VIS-PR3_IM_DAMP_R_INMON -30 2100
 K1:VIS-PR3_IM_DAMP_P_INMON -1760 -1512
 K1:VIS-PR3_IM_DAMP_Y_INMON 180 2622

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