Reports 1-1 of 1 Clear search Modify search
VIS (IMM)
satoshi.tanioka - 16:20 Tuesday 12 June 2018 (5247) Print this report
IMMT1 modification
Ohishi, Nagano and Tanioka

Today, we tried to install IMMT1 suspension in to the chamber.
To do that, we locked the suspension.
When we are locking the bellows, one of the magnet separated from the mirror surface.

According to Saito-san's decision, we glued it inside clean booth.
Search Help
×

Warning

×