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VAC (General)
takashi.uchiyama - 11:35 Sunday 18 March 2018 (4489) Print this report
Leak test in the area from GVmc to GVbsx and GVbsy
Mirapro, Uchiyama


We did leak test in the area from GVmc to GVbsx and GVbsy on 17 March.
Vacuum pressure reached about 1*10^-3Pa in the morning on 17 March.
Then, we started the leak test.

Background level of the test was about 5*10^-9 Pa m^3/sec.

We found 3 of 10^-8 Pa m^3/sec order leaks.
Those are found at GVmc and +X side flange and -X side flange of the BS chamber.

We restarted pumping after the leak test by 4 or 5 units of TMPs.
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