Look into the MCi along to the vacuum duct from the PSL room. The auto level height was adjusted to MCi center (standoff). Then the output mirror height was adjusted to same height with MCi.

 

2. attached the target seal on a wall of PSL room.

A target seal was attached on the wall as below figure. The height of target seal was almost same as the IMC height. 

The height difference was measured by auto level. The MCi was higher than the seal by 0.22mm. 

 

 

________________  duct ____seal_________

|                               |         |                        

|                               |         |

|         ___________| ___  | _____________
|        |                                                            |
|        |                                                            |

|        |                   optical table                      |  

|        |                                                            |     

|        |______________________________|

|

|

|_______________________________________