[Ushiba]

Today, I checked all cables again after repairing of MNH1 and foundthat there are still some unhealthy caables.
P6-1 (MNH1 sensor & actuator): 7 pin is grounded (~18 ohm)
P6-5 (MNV1 sensor & actuator): foreward voltage of LED is strange (1.364 V while nominal is about 0.94 - 0.95)
P6-8 (MN & IM thermometer): 9 pin is grounded (~ 4 ohm)

Also, I found several port is grounded at 5 pin.
P6-2 (~0.8 ohm)
P6-5 (~1.7 ohm)
P6-6 (~0.9 ohm)

However, I thought it is not a serious problem because the 5 pin is not connected to anywhere inside the chamber.