Member: Yamamoto, Inoue, Darkhan

We measured the TF of Actuation and Sensing part.
The followings are the estimated parameters.

Hx=( 4.523827014127088 pm 0.02421249166191169 )x1e-12
Hy=( 3.8861236700566346 pm 0.02729965680804218 )x1e-12
tau_ax=( -0.7846464329719642 pm 1.7813001344238282 )x1e-6
tau_ay=( 0.812498399648811 pm 2.056405883625459 )x1e-6
Hc=( 0.22391883309369365 pm 0.0048678363563895745 )x1e8
fcc=( 20.523743314968353 pm 0.41660545206804195 )
tau_c=( -27.355609505458283 pm 4.926403005284534 )x1e-6