I am planning to do the DRIVEALIGN matrix for SRM. For preparation, I found that there is DC actuation coupling from L2P. I comfirmed that the oplev is still diagonalized and coarsely changed the OSEM2EUL.
Hi Terrence,
Thank you for working on it.
I am not sure how you actuated the optic in DC, but please note that the optic rotates in pitch if you purely push the optic in L from the RM.
In order to identify the pure pitch and length motion, you have to see the transfer function. The gain of the L2P transfer function drops with f^-4 above the resonant frequency of the optic pendulum mode.